Full-chip characterization of compression algorithms for direct-write maskless lithography systems
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چکیده
منابع مشابه
Full Chip Characterization of Compression Algorithms for Direct Write Maskless Lithography Systems
Future lithography systems must produce more dense microchips with smaller feature sizes, while maintaining throughput comparable to today’s optical lithography systems. This places stringent data-handling requirements of up to 12 Tb/sec on the design of any maskless lithography system. In our past work, we have developed data-path architectures for such throughput, and shown that lossless comp...
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Hsin-I Liu Vito Dai Avideh Zakhor Borivoje Nikolić University of California, Berkeley Department of Electrical Engineering and Computer Science Berkeley, California E-mail: [email protected] Abstract. Achieving the throughput of one wafer layer per minute with a direct-write maskless lithography system, using 22-nm pixels for 45-nm feature sizes, requires data rates of about 12 Tb/s. In ou...
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Architecture and Hardware Design of Lossless Compression Algorithms for Direct-Write Maskless Lithography Systems by Hsin-I Liu Doctor of Philosophy in Engineering Electrical Engineering and Computer Sciences University of California, Berkeley Professor Avideh Zakhor, Chair Future lithography systems must produce chips with smaller feature sizes, while maintaining throughput comparable to today...
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Future lithography systems must produce more dense chips with smaller feature sizes, while maintaining throughput comparable to today’s optical lithography systems. This places stringent data-handling requirements on the design of any maskless lithography system. Today’s optical lithography systems transfer one layer of data from the mask to the entire wafer in about sixty seconds. To achieve a...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2010
ISSN: 1932-5150
DOI: 10.1117/1.3366553